View Enquiry List Attolight
Total: 3 items
Attolight started off to revolutionize cathodoluminescence (CL): design top of the line CL instruments that deliver superior performance, maximum ease-of-use and to make quantitative cathodoluminescence possible. The Company firmly believes in the potential of cathodoluminescence and aims at establishing the technology as a standard in-line inspection method in semiconductor industry.
The Säntis 300 system has been designed for fully automated control of 150, 200 and 300mm wafers.
SEM – Cathodoluminescence – Photoluminescence Spectroscopic Analysis – Pump & Probe Electrical Measurements – Nanoprobes
Cathodoluminescence – Photoluminescence – Thermo-emission – Compatiblity with EELS, EDS…
