RPS50

RPS50 can generate active oxygen or hydrogen radicals, which react chemically with hydrocarbon contaminants on the sample surface and inside the SEM chamber, producing gases such as CO2 and H2O. These gases are then pumped out by the vacuum pump. This ultimately achieves the purpose of cleaning carbon accumulation on the sample, while improving imaging resolution and contrast, and shortening the pumping time of the SEM chamber. RPS50 is compatible with most mainstream SEM and FIB brands.