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Mask Aligner

MDA-400M Mask Aligner

MDA-400M Mask Aligner

Substrate size: 4inch Mask size: 5 inch Alignment accuracy 1um
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Brand: Midas Available
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Substrate size: 4inch
Mask size: 5 inch
Alignment accuracy 1um

 

SPEC

  • TypeFully manual
  • Mask sizeup to 5 inch
  • Substrate sizepiece to 4 inch circle
  • Uniform beam size4.25 * 4.25 inch
  • UV light sourceUV Lamp, 350 W
  • Beam wavelength350 ~ 450 nm
  • Beam uniformity<±3 %
  • 365 nm intensity~ 25 mW/?
  • Alignment methodmanual
  • Alignment accuracy1 um
  • Process modeSoft, Hard, Vacuum contact & Proximity
  • Process resolution1 um @ 1 um PR thickness with vacuum contact
  • Weight (kg)
  • Dimensions (mm)1080(W) * 1060(D) * 1580(H)
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