J20

Overview

Field Emission Scanning Electron Microscopes (FE-SEMs) boast higher resolution compared to filament SEMs, with magnifications reaching up to 100K times. This imposes more stringent demands on the particle size of the sputter coating instrument, necessitating fine particles that do not cover the sample surface and contribute to improvements in charge elimination and contrast enhancement.

The conventional approach for sample preparation in FE-SEMs involves sputter coating with Pt metal. However, the conductivity and electron signal excitation capability of Pt are not as optimal as Au, especially in 3D powder, porous, and membrane sample scenarios where Pt deposition alone may not be sufficient.

To address this, we have designed a dual-target ion sputter coater and developed a layering process: first sputtering a layer of Pt and then a layer of Au. This layered sputter coating mode effectively suppresses the formation of Au islands. Simultaneously considering conductivity and particle size, it results in excellent charge elimination and contrast enhancement for powder and membrane samples.

Metals that can be deposited: Au, Pt, and Pd.

An alloy of arbitrary composition: Pt-Au, Pt-Pd, etc.

Key Features

1. Dual-target magnetron sputtering cathode: No need to change targets, utilizing a unique layered sputtering process.
2. Touch screen automatic control: Convenient and time-saving to use.
3. Digital rotary-tilting sample stage: Facilitates 3D sample deposition.