PECVD System - Nanomaster Inc

NPE-4000 - PECVD System

NPE-4000 - PECVD System

ANO-MASTER's PECVD systems are capable of depositing high quality SiO2, Si3N4, CNT, DLC or SiC films. Depending on application, RF showerhead, Hollow Cathode, ICP or Microwave plasma sources can be used. The platen can accomodate ...
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    Material Science & Nanotechnology