Material Characterisation

Non-contact sheet resistance and layer thickness measurement solutions for process control The EddyCus TF inline series measures layer properties such as metal layer thickness or sheet resistance in non-contact on various substrates. Typical substrates are glass, foil, paper, wafer, plastic or ceramic. Measurements are obtained by permanent measurements or by trigger events to obtain equidistant results in fast moving coating processes or measure on specific positions on small specimen. Monitoring is possible in atmosphere and in vacuum. The measurements are obtained using high samples rate and can be directly provided for process control systems and customer software. Additionally SURAGUS offers the monitoring software EddyCus TF control that visualizes, stores and analyses metrology data.