VertaCure
Automated Vacuum Cure System for Polyimide/BCB/PBO/Low Temp Polymers
Faster than atmospheric process with >60% higher throughput
2-3X lower cost of ownership, 1.6-2x less N2 consumption and >98% uptime
More complete cure (5X less outgassing)
5-zone temperature control with < 1.0% uniformity
Laminar flow for excellent particle performance
Active heating and cooling for variable ramp-up and ramp-down
Accommodates 50 – 100 wafers
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