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NTE-3500 - Thermal Evaporation System
NANO-MASTER’s NTE-3000 is a PC controlled tabletop Thermal Evaporation system with a wide range of applications in organic and metal evaporation. It is a 2kVA system utilizing SCR circuitry for accurate temperature control which is crucial when evaporating organic materials. It is designed with extreme care to achieve clean, uniform, and reproducible processes on a small footprint. It provides low cost, high quality capabilities for demanding applications in R&D and low scale manufacturing.
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Specifications
- 12" Bell Jar / Cylindrical 10" SS / Cubical 14" SS chamber
- Up to 7"x7" plates and 200mm wafers
- Two evaporation sources
- Water cooled feedthrus
- Solid state switching for sequential evaporation
- SCR circuitry for accurate control
- Individual source and substrate shutters
- Cross contamination shields
- Quartz crystal thickness sensor
- Twist lock mechanism for easy substrate holder load/unload
- Substrate rotation
- Closed loop evaporation control
- Fully automated PC based, recipe driven
- LabVIEW user interface
- EMO protection and safety interlocks
