Mask Aligner

Substrate size: 4inch
Mask size: 5 inch
Alignment accuracy 1um

 

SPEC

• TypeFully manual
• Mask sizeup to 5 inch
• Substrate sizepiece to 4 inch circle
• Uniform beam size4.25 * 4.25 inch
• UV light sourceUV Lamp, 350 W
• Beam wavelength350 ~ 450 nm
• Beam uniformity<±3 %
• 365 nm intensity~ 25 mW/?
• Alignment methodmanual
• Alignment accuracy1 um
• Process modeSoft, Hard, Vacuum contact & Proximity
• Process resolution1 um @ 1 um PR thickness with vacuum contact
• Weight (kg)
• Dimensions (mm)1080(W) * 1060(D) * 1580(H)