Parylene Coater

Specifications

General

Vaporizer	Max. 200°C (Up to 10 steps)
Pyrolysis	Max. 800°C (3 Zoned Heater)
Chamber	I.D. 200 X Length 420 (mm)
Operation	Manual & Automatic
Geometry	W.1,600 x D.800 x H.1,300 (mm)

 

Vaporizer

• Single Block Aluminum (Not welded, Minimized Leakage)
• Heater : Max. 200°C
• Door heater for thermal blocking : Max. 200°C
• Vaporizing temp. setting : up to 10 step (Temp & Time)

 

Pyrolyzer

• Tube Material: Quartz (or Inconel as an alternative)
• Pyrolizer heater : Max. 800°C
• 3 x zoned (independent) heater
• Temperature Sensor: 2-wire K-type sensor x 3ea (Each sensor for each heater)

 

Deposition Chamber

• Single Block Aluminum (Not welded, Minimized Leakage)
• Uniform gas flow design (Patent No. 10-1701381)
• Chamber size : I.D. 200 mm x L. 420 mm
• Sample Loading Plate
• Rotary feed through

 

Cold Trap

• Trap method : Direct trap, Glass condenser
• Lowest temperature : - 80°C
• Ambient temperature : 5 ~ 30°C

 

Vacuum Package

• Pump: Oil Rotary Pump
• Pump displacement: 1,000 L/min @ 60Hz
• Ultimate Pressure: 5x10^-3 Torr

 

Controller

• DSP on board signal controller
• Automatic / Manual operation

 

Interactive Integrated Software

• 10.2” Touchscreen PC & USB data transfer
• Saving and loading of process recipes
• Real-time process graphs and error monitoring

 

System Dimension

• Main System : 1,600x800x1,300 (WxDxH, mm)
• Cold Trap : 505x620x750 (WxDxH, mm)
• Vacuum Pump : 283x736x360 (WxDxH, mm)
• * Sizes may vary according to the customer’s requirements and product upgrades