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EZ6 Spin Coater
Suitable for coating applications. Small footprint designed for glove boxes. - Speed : 100-12000rpm - Substrates up to Ø150mm - Up to 10 Customizable Spin Programs
WhatsappOverview
Suitable for coating applications. Small footprint designed for glove boxes.
Specifications
- Substrate sizes: 1cm – 4”/6”/8” wafer or substrates
- Spin speed range: 100 to 12000 RPM
- Spin speed resolution: 1RPM
- Acceleration range: 100 to 30000 RPM/s
- Program: 10 spin programs with 10 steps for each program
- Safety: Vacuum interlock and spin lid interlock
