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Overview
LEBO Science EZ4 Spin Coater is a high performance compact spin coater. It is designed for high uniformity thin material coatings. With its small footprint, the spin coater can be installed in a fume hood or a glove box. The upgraded program can store up to five recipes and each recipe could be edited with five spin steps.
Features
- 5 spin programs with 5 steps for each
- Substrate sizes: from 1cm up to 4" wafer
Specifications
- Spin speed range: 100 - 9999 RPM
- Spin speed resolution: 1 RPM
- Acceleration range: 100 - 9999 RPM/S
- Maximum step time: 3000s
