Hybridized SEM – Spectroscopic Platform (FA CL SEM)

Overview

The Allalin is a nanometer resolution spectroscopy instrument, based on a unique and patented system including an optical collection objective integrated within the SEM column.

One platform, multiple possibilities of measurements
This platform offers a very large range of spectroscopic analysis thanks to its multiple sources (electronic, laser in continuous or pulsed mode) and many types of detectors (PMT, CCD/Streak cameras, TCSPC/ADP… detectors, Raman…). In addition, the system can be equipped with various options such as : EBIC system, nanoprobes, HV transfer unit and can welcome small samples from few µm size to wafers up to 6 inches.

The spectroscopic analyses can be conducted at any temperature from RT down to 10K thanks to an integrated Helium cryostat and copper braid coupling ensuring high stability and very low drift.

 

Features

The base system is a SEM – spectroscopic platform on which multiple options can be adapted:

Sources

• Continuous/pulsed electronic source
• Continuous/pulsed laser

Spectrometers

• up to 2 spectrometers on the platform

Detectors
Continuous detectors

• PMT
• UV-Visible (EM-)CCD camera (from 180nm to 1050nm)
• InGaAs detector (from 900 to 2200nm)

Time-resolved detectors

• Streak camera
• TCSPC detector

Stages

• Nano-positioning stage (cryo-compatible)
•  3’/6’ wafer stage

Options

• Nanoprobes (up to 4 probes)
• Raman line
• EBIC/EBAC

 

Applications

• Electronics & optoelectronics (GaN, InP, SiC…)
• Photovoltaic cells (GaAs, CdTe, Perovskites…)
• Light emitting diodes (MicroLEDs)
• 2D materials (Graphene, BN, WS2…)
• Noble metals (plasmonic)
• Nano-micro particles
• Nano-micro wires/rods
• Photonic crystals
• Quantum wells & quantum dots
• Minerals, glasses, ceramics and gemstones
• Inorganic coatings
• Polymers layers
• Organic materials
• Biological samples, cells, vesicles
• …