Spin Coater

AC300 is an economic desktop Vacuum Spin Coater without vacuum chunk which is designed for quality coating of sol-gel at the lowest cost. By using adhesive tape to stick and hold samples on the rotating plate, the instrument provides the advantages of cost effectiveness and ease of maintenance. Complete accessories such as vacuum chuck, oilless vacuum pump, electrical wire is included for immediately use.

 

Ultra-high speed precision and stability design, internal cavity vacuum design (up to -0.08MPa) to reduce air flow disturbance, special stage tooling design to achieve ultra-high glue uniformity.

 

Features

• Maximum for 12 inch wafer coating
• Matrial: Anodic Oxidation Aluminium Shell
• 7"LCD Panel with Enghlish Instruction Manual Book
• Oiless vacuum pump with low noise
• Servo motor, more stability

 

Specifications

Chamber Size	310mm
Maximum wafer sample	12inch (300mm)
Spin Speed	100~10000RPM
Acceleration adjustable range	0~50000-rpm/s
Each step max coating time	3000s
Chamber Vacuum degree	<-0.06MPa
Spin Control	Programmable control,100programmable with each 100steps can restore
Spin Resolution	1 rpm
Power supply	AC110-230V, adjustable
Dimension	613*463*306mm