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Park NX20 - Complete AFM System
Park NX20 is equipped with unique features that make it easier to uncover the reasons behind device failure and develop more creative solutions. Its unparalleled precision provides high resolution data that lets you focus on your work, while its True Non-Contact™ mode scan keeps tips sharper and longer, so you won’t have to waste as much time and money replacing them.
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The leading nano metrology tool for failure analysis and large sample research
As an FA engineer, you’re expected to deliver results. There’s no room for error in the data provided by your instruments. Park NX20, with its reputation as the world’s most accurate large sample AFM, is rated so highly in the semiconductor and hard disk industry for its data accuracy.
Specifications
XY ScannerSingle-module flexure XY scanner with closed-loop control
Scan range : 100μm x 100μm
50μm x 50μm
25μm x 25μm
20-bit position control and 24-bit position sensor
Motorized Stage
XY travel range : 150 mm (200 mm optional)
Z travel range : 25 mm
Focus travel range : 8 mm
Precision encoder for all axes (optional)
Guided high-force Z scanner
Scan range : 15 µm
30 µm
20-bit position control and 24-bit position sensor
Sample Mount
Up to 150 mm (200 mm optional)
Vacuum grooves to hold wafer samples
Vision
Objective Lens
10× (0.21 NA) objective lens with ultra-long working distance
20× (0.42 NA) objective lens with long working distance and high resolution
Direct on-axis vision of sample surface and cantilever
Coupled with 10× objective lens (20× optional)
Field-of-view : 840 × 630 µm (420 × 315 µm optional)
CCD : 5M pixel
Software
SmartScan™
Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs(optional)
XEI
AFM data analysis software
Electronics
Signal processing
ADC : 18 channels
4 high-speed ADC channels (64 MSPS)
24-bit ADCs for X, Y, and Z scanner position sensor
DAC : 12 channels
2 high-speed DAC channels (64 MSPS)
20-bit DACs for X, Y, and Z scanner positioning
Maximum data size : 4096 x 4096 pixels
Integrated functions
3 channels of flexible digital lock-in amplifier
Digital Q control
External signal access
20 embedded signal input/output ports
5 TTL outputs : EOF, EOL, EOP, Modulation, and AC bias
